♦Alumina (Al2O3)
Akụkụ seramiiki ziri ezi nke ZhongHui Intelligent Manufacturing Group (ZHHIMG) mepụtara nwere ike ịbụ nke akụrụngwa seramiiki dị ọcha, 92 ~ 97% alumina, 99.5% alumina,> 99.9% alumina, na CIP oyi isostatic ịpị.Igwe ọkụ dị elu na nhazi nkenke, nha nha nke ± 0.001mm, ire ụtọ ruo Ra0.1, jiri okpomọkụ ruo ogo 1600.Enwere ike ịme agba dị iche iche nke ceramik dị ka ihe ndị ahịa chọrọ, dị ka: nwa, ọcha, agba aja aja, uhie uhie, wdg The kpọmkwem seramiiki akụkụ nke ụlọ ọrụ anyị na-emepụta na-eguzogide ọgwụ dị elu okpomọkụ, corrosion, eyi na mkpuchi, na ike ịbụ. eji ogologo oge na elu okpomọkụ, agụụ na corrosive gas gburugburu ebe obibi.
A na-ejikarị eme ihe n'ọtụtụ dị iche iche nke semiconductor mmepụta ngwá ọrụ: Frames (bracket bracket), Substrate (base), Arm / Bridge (manpulator), , Mechanical Components and Ceramic Air Bearing.
Aha ngwaahịa | Ọcha dị elu 99 Alumina Ceramic Square Tube / Pipe / Rod | |||||
Index | Nkeji | 85% Al2O3 | 95% Al2O3 | 99% Al2O3 | 99.5% Al2O3 | |
Njupụta | g/cm3 | 3.3 | 3.65 | 3.8 | 3.9 | |
Mmiri Absorption | % | <0.1 | <0.1 | 0 | 0 | |
Ọnọdụ okpomọkụ | ℃ | 1620 | 1650 | 1800 | 1800 | |
Isi ike | Mohs | 7 | 9 | 9 | 9 | |
Ike na-ehulata (20 ℃)) | Mpa | 200 | 300 | 340 | 360 | |
Ike mkpakọ | Kgf/cm2 | 10000 | 25000 | 30000 | 30000 | |
Ogologo oge na-arụ ọrụ okpomọkụ | ℃ | 1350 | 1400 | 1600 | 1650 | |
Oke.Okpomọkụ na-arụ ọrụ | ℃ | 1450 | 1600 | 1800 | 1800 | |
Mgbochi olu | 20 ℃ | Ω.cm3 | > 1013 | > 1013 | > 1013 | > 1013 |
100 ℃ | 1012-1013 | 1012-1013 | 1012-1013 | 1012-1013 | ||
300 ℃ | >109 | > 1010 | > 1012 | > 1012 |
Ngwa nke seramiiki alumina dị ọcha:
1. A na-etinye ya na ngwá ọrụ semiconductor: ceramic vacuum chuck, ịkpụ diski, diski nhicha, ceramic CHUCK.
2. Akụkụ mbufe wafer: chucks njikwa wafer, diski ịkpụ wafer, diski ihicha wafer, iko nyocha nyocha anya wafer.
3. LED / LCD flat panel ngosi ụlọ ọrụ: seramiiki nozzle, seramiiki egweri diski, LIFT PIN, PIN okporo ígwè.
4. Nkwukọrịta ngwa anya, ụlọ ọrụ anyanwụ: tubes seramiiki, mkpanaka seramiiki, mbadamba seramiiki na-ebipụta ihuenyo seramiiki.
5. Akụkụ na-ekpo ọkụ na-ekpo ọkụ na ọkụ eletrik: ọkpụkpụ seramiiki.
Ugbu a, aluminom oxide ceramics nwere ike kewaa n'ime ịdị ọcha dị elu na ceramics nkịtị.Usoro ceramics nke aluminom oxide dị ọcha na-ezo aka na ihe seramiiki nwere ihe karịrị 99.9% Al₂O₃.N'ihi ọnọdụ okpomọkụ ya na-agbago ruo 1650 - 1990 ° C na ogologo nnyefe ya nke 1 ~ 6μm, a na-edozi ya ka ọ bụrụ iko fused kama platinum crucible: nke enwere ike iji dị ka tube sodium n'ihi nnyefe ọkụ ya na nguzogide corrosion. metal alkali.N'ime ụlọ ọrụ eletrọnịkị, enwere ike iji ya dị ka ihe mkpuchi ikuku na-adị elu maka ihe ndị IC.Dabere na ọdịnaya dị iche iche nke aluminom oxide, usoro seramiiki aluminom oxide a na-ahụkarị nwere ike kewaa n'ime ceramik 99, ceramiki 95, ceramiki 90 na ceramiki 85.Mgbe ụfọdụ, a na-ekewa seramiiki nwere 80% ma ọ bụ 75% nke aluminom oxide dị ka usoro seramiiki aluminom oxide nkịtị.N'ime ha, a na-eji 99 aluminum oxide ceramic ihe na-emepụta ihe na-ekpo ọkụ na-ekpo ọkụ, ọkụ ọkụ ọkụ ọkụ na ihe ndị pụrụ iche na-eguzogide, dị ka seramiiki bearings, ceramic seals na valve plates.A na-eji seramiki 95 aluminom mee ihe dị ka akụkụ na-eguzogide corrosion na-eguzogide.A na-agwakọta ceramiki 85 na ụfọdụ akụrụngwa, si otú a na-emeziwanye arụmọrụ eletriki na ike igwe.Ọ nwere ike iji molybdenum, niobium, tantalum na akara ọla ndị ọzọ, na ụfọdụ a na-eji dị ka igwe ọkụ eletrik.
Ihe dị mma (Uru Nnọchiteanya) | Aha ngwaahịa | AES-12 | AES-11 | AES-11C | AES-11F | AES-22S | AES-23 | AL-31-03 | |
Ngwakọta kemịkalụ dị ala-sodium Easy Sintering Ngwaahịa | H₂O | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
Lol | % | 0.1 | 0.2 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | |
Fe₂0₃ | % | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | |
SiO₂ | % | 0.03 | 0.03 | 0.03 | 0.03 | 0.02 | 0.04 | 0.04 | |
Na₂O | % | 0.04 | 0.04 | 0.04 | 0.04 | 0.02 | 0.04 | 0.03 | |
MgO* | % | - | 0.11 | 0.05 | 0.05 | - | - | - | |
Al₂0₃ | % | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | |
Dayameta ihe dị n'ọkara (MT-3300, usoro nyocha laser) | μm | 0.44 | 0.43 | 0.39 | 0.47 | 1.1 | 2.2 | 3 | |
Nha kristal | μm | 0.3 | 0.3 | 0.3 | 0.3 | 0.3-1.0 | 0.3-4 | 0.3-4 | |
Na-akpụ njupụta** | g/cm³ | 2.22 | 2.22 | 2.2 | 2.17 | 2.35 | 2.57 | 2.56 | |
Njupụta dị egwu *** | g/cm³ | 3.88 | 3.93 | 3.94 | 3.93 | 3.88 | 3.77 | 3.22 | |
Ọnụego mbelata nke Line Sintering** | % | 17 | 17 | 18 | 18 | 15 | 12 | 7 |
* Agụnyeghị MgO na ngụkọ ịdị ọcha nke Al₂O₃.
* Enweghị ntụ ntụ 29.4MPa (300kg/cm²), okpomọkụ na-ekpo ọkụ bụ 1600 ° C.
AES-11 / 11C / 11F: Tinye 0.05 ~ 0.1% MgO, sinterability bụ magburu onwe ya, n'ihi ya, ọ na-emetụta aluminum oxide ceramics na ịdị ọcha nke ihe karịrị 99%.
AES-22S: Amara ya site na njupụta dị elu na obere mbelata nke ahịrị sintering, ọ dabara na nkedo nkedo na ngwaahịa ndị ọzọ buru ibu na nha nha chọrọ.
AES-23 / AES-31-03: Ọ nwere njupụta dị elu, thixotropy na viscosity dị ala karịa AES-22S.A na-eji nke mbụ eme ihe na ceramics mgbe a na-eji nke ikpeazụ eme ihe dị ka mmiri na-ebelata ihe ọkụ ọkụ, na-enweta ewu ewu.
♦ Silicon Carbide (SiC) Njirimara
Njirimara izugbe | Ịdị ọcha nke ihe ndị bụ isi (wt%) | 97 | |
Agba | Nwa | ||
Njupụta (g/cm³) | 3.1 | ||
Ntinye mmiri (%) | 0 | ||
Njirimara igwe | Ike mgbanwe (MPa) | 400 | |
Modules na-eto eto (GPa) | 400 | ||
Vickers hardness (GPa) | 20 | ||
Njirimara okpomọkụ | Okpomọkụ kacha arụ ọrụ (°C) | 1600 | |
Ọnụọgụ mgbasawanye okpomọkụ | RT ~ 500C | 3.9 | |
(1/°C x 10-6) | RT ~ 800C | 4.3 | |
Nrụpụta ọkụ (W/m x K) | 130 110 | ||
Mgbochi ujo ΔT (°C) | 300 | ||
Àgwà ọkụ eletrik | Olu resistivity | 25°C | 3 x 106 |
300°C | - | ||
500°C | - | ||
800°C | - | ||
Dielectric mgbe niile | 10GHz | - | |
Mfu ọkụ eletrik (x 10-4) | - | ||
Ihe kpatara Q (x 104) | - | ||
voltaji ndakpọ dielectric (KV/mm) | - |
♦Silicon nitride Ceramic
Ihe onwunwe | Nkeji | Si₃N₄ |
Usoro ịgbakọ | - | Akwụsịla nrụgide gas |
Njupụta | g/cm³ | 3.22 |
Agba | - | Ọchịchịrị Grey |
Ọnụego mmịpụta mmiri | % | 0 |
Modul na-eto eto | Gpa | 290 |
Vickers ike ike | Gpa | 18-20 |
Ike mkpakọ | Mpa | 2200 |
Na-ehulata Ike | Mpa | 650 |
Nrụpụta okpomọkụ | W/mK | 25 |
Nguzogide okpomọkụ nke okpomọkụ | Δ (°C) | 450-650 |
Okpomọkụ arụ ọrụ kacha | Celsius C | 1200 |
Mgbochi olu | Ω·cm | > 10 ^ 14 |
Dielectric Constant | - | 8.2 |
Ike Dielectric | kV/mm | 16 |