Ihe - seramiiki

♦Alumina (Al2O3)

Akụkụ seramiiki ziri ezi nke ZhongHui Intelligent Manufacturing Group (ZHHIMG) mepụtara nwere ike ịbụ nke akụrụngwa seramiiki dị ọcha, 92 ~ 97% alumina, 99.5% alumina,> 99.9% alumina, na CIP oyi isostatic ịpị.Igwe ọkụ dị elu na nhazi nkenke, nha nha nke ± 0.001mm, ire ụtọ ruo Ra0.1, jiri okpomọkụ ruo ogo 1600.Enwere ike ịme agba dị iche iche nke ceramik dị ka ihe ndị ahịa chọrọ, dị ka: nwa, ọcha, agba aja aja, uhie uhie, wdg The kpọmkwem seramiiki akụkụ nke ụlọ ọrụ anyị na-emepụta na-eguzogide ọgwụ dị elu okpomọkụ, corrosion, eyi na mkpuchi, na ike ịbụ. eji ogologo oge na elu okpomọkụ, agụụ na corrosive gas gburugburu ebe obibi.

A na-ejikarị eme ihe n'ọtụtụ dị iche iche nke semiconductor mmepụta ngwá ọrụ: Frames (bracket bracket), Substrate (base), Arm / Bridge (manpulator), , Mechanical Components and Ceramic Air Bearing.

AL2O3

Aha ngwaahịa Ọcha dị elu 99 Alumina Ceramic Square Tube / Pipe / Rod
Index Nkeji 85% Al2O3 95% Al2O3 99% Al2O3 99.5% Al2O3
Njupụta g/cm3 3.3 3.65 3.8 3.9
Mmiri Absorption % <0.1 <0.1 0 0
Ọnọdụ okpomọkụ 1620 1650 1800 1800
Isi ike Mohs 7 9 9 9
Ike na-ehulata (20 ℃)) Mpa 200 300 340 360
Ike mkpakọ Kgf/cm2 10000 25000 30000 30000
Ogologo oge na-arụ ọrụ okpomọkụ 1350 1400 1600 1650
Oke.Okpomọkụ na-arụ ọrụ 1450 1600 1800 1800
Mgbochi olu 20 ℃ Ω.cm3 > 1013 > 1013 > 1013 > 1013
100 ℃ 1012-1013 1012-1013 1012-1013 1012-1013
300 ℃ >109 > 1010 > 1012 > 1012

Ngwa nke seramiiki alumina dị ọcha:
1. A na-etinye ya na ngwá ọrụ semiconductor: ceramic vacuum chuck, ịkpụ diski, diski nhicha, ceramic CHUCK.
2. Akụkụ mbufe wafer: chucks njikwa wafer, diski ịkpụ wafer, diski ihicha wafer, iko nyocha nyocha anya wafer.
3. LED / LCD flat panel ngosi ụlọ ọrụ: seramiiki nozzle, seramiiki egweri diski, LIFT PIN, PIN okporo ígwè.
4. Nkwukọrịta ngwa anya, ụlọ ọrụ anyanwụ: tubes seramiiki, mkpanaka seramiiki, mbadamba seramiiki na-ebipụta ihuenyo seramiiki.
5. Akụkụ na-ekpo ọkụ na-ekpo ọkụ na ọkụ eletrik: ọkpụkpụ seramiiki.
Ugbu a, aluminom oxide ceramics nwere ike kewaa n'ime ịdị ọcha dị elu na ceramics nkịtị.Usoro ceramics nke aluminom oxide dị ọcha na-ezo aka na ihe seramiiki nwere ihe karịrị 99.9% Al₂O₃.N'ihi ọnọdụ okpomọkụ ya na-agbago ruo 1650 - 1990 ° C na ogologo nnyefe ya nke 1 ~ 6μm, a na-edozi ya ka ọ bụrụ iko fused kama platinum crucible: nke enwere ike iji dị ka tube sodium n'ihi nnyefe ọkụ ya na nguzogide corrosion. metal alkali.N'ime ụlọ ọrụ eletrọnịkị, enwere ike iji ya dị ka ihe mkpuchi ikuku na-adị elu maka ihe ndị IC.Dabere na ọdịnaya dị iche iche nke aluminom oxide, usoro seramiiki aluminom oxide a na-ahụkarị nwere ike kewaa n'ime ceramik 99, ceramiki 95, ceramiki 90 na ceramiki 85.Mgbe ụfọdụ, a na-ekewa seramiiki nwere 80% ma ọ bụ 75% nke aluminom oxide dị ka usoro seramiiki aluminom oxide nkịtị.N'ime ha, a na-eji 99 aluminum oxide ceramic ihe na-emepụta ihe na-ekpo ọkụ na-ekpo ọkụ, ọkụ ọkụ ọkụ ọkụ na ihe ndị pụrụ iche na-eguzogide, dị ka seramiiki bearings, ceramic seals na valve plates.A na-eji seramiki 95 aluminom mee ihe dị ka akụkụ na-eguzogide corrosion na-eguzogide.A na-agwakọta ceramiki 85 na ụfọdụ akụrụngwa, si otú a na-emeziwanye arụmọrụ eletriki na ike igwe.Ọ nwere ike iji molybdenum, niobium, tantalum na akara ọla ndị ọzọ, na ụfọdụ a na-eji dị ka igwe ọkụ eletrik.

 

Ihe dị mma (Uru Nnọchiteanya) Aha ngwaahịa AES-12 AES-11 AES-11C AES-11F AES-22S AES-23 AL-31-03
Ngwakọta kemịkalụ dị ala-sodium Easy Sintering Ngwaahịa H₂O % 0.1 0.1 0.1 0.1 0.1 0.1 0.1
Lol % 0.1 0.2 0.1 0.1 0.1 0.1 0.1
Fe₂0₃ % 0.01 0.01 0.01 0.01 0.01 0.01 0.01
SiO₂ % 0.03 0.03 0.03 0.03 0.02 0.04 0.04
Na₂O % 0.04 0.04 0.04 0.04 0.02 0.04 0.03
MgO* % - 0.11 0.05 0.05 - - -
Al₂0₃ % 99.9 99.9 99.9 99.9 99.9 99.9 99.9
Dayameta ihe dị n'ọkara (MT-3300, usoro nyocha laser) μm 0.44 0.43 0.39 0.47 1.1 2.2 3
Nha kristal μm 0.3 0.3 0.3 0.3 0.3-1.0 0.3-4 0.3-4
Na-akpụ njupụta** g/cm³ 2.22 2.22 2.2 2.17 2.35 2.57 2.56
Njupụta dị egwu *** g/cm³ 3.88 3.93 3.94 3.93 3.88 3.77 3.22
Ọnụego mbelata nke Line Sintering** % 17 17 18 18 15 12 7

* Agụnyeghị MgO na ngụkọ ịdị ọcha nke Al₂O₃.
* Enweghị ntụ ntụ 29.4MPa (300kg/cm²), okpomọkụ na-ekpo ọkụ bụ 1600 ° C.
AES-11 / 11C / 11F: Tinye 0.05 ~ 0.1% MgO, sinterability bụ magburu onwe ya, n'ihi ya, ọ na-emetụta aluminum oxide ceramics na ịdị ọcha nke ihe karịrị 99%.
AES-22S: Amara ya site na njupụta dị elu na obere mbelata nke ahịrị sintering, ọ dabara na nkedo nkedo na ngwaahịa ndị ọzọ buru ibu na nha nha chọrọ.
AES-23 / AES-31-03: Ọ nwere njupụta dị elu, thixotropy na viscosity dị ala karịa AES-22S.A na-eji nke mbụ eme ihe na ceramics mgbe a na-eji nke ikpeazụ eme ihe dị ka mmiri na-ebelata ihe ọkụ ọkụ, na-enweta ewu ewu.

♦ Silicon Carbide (SiC) Njirimara

Njirimara izugbe Ịdị ọcha nke ihe ndị bụ isi (wt%) 97
Agba Nwa
Njupụta (g/cm³) 3.1
Ntinye mmiri (%) 0
Njirimara igwe Ike mgbanwe (MPa) 400
Modules na-eto eto (GPa) 400
Vickers hardness (GPa) 20
Njirimara okpomọkụ Okpomọkụ kacha arụ ọrụ (°C) 1600
Ọnụọgụ mgbasawanye okpomọkụ RT ~ 500C 3.9
(1/°C x 10-6) RT ~ 800C 4.3
Nrụpụta ọkụ (W/m x K) 130 110
Mgbochi ujo ΔT (°C) 300
Àgwà ọkụ eletrik Olu resistivity 25°C 3 x 106
300°C -
500°C -
800°C -
Dielectric mgbe niile 10GHz -
Mfu ọkụ eletrik (x 10-4) -
Ihe kpatara Q (x 104) -
voltaji ndakpọ dielectric (KV/mm) -

20200507170353_55726

♦Silicon nitride Ceramic

Ihe onwunwe Nkeji Si₃N₄
Usoro ịgbakọ - Akwụsịla nrụgide gas
Njupụta g/cm³ 3.22
Agba - Ọchịchịrị Grey
Ọnụego mmịpụta mmiri % 0
Modul na-eto eto Gpa 290
Vickers ike ike Gpa 18-20
Ike mkpakọ Mpa 2200
Na-ehulata Ike Mpa 650
Nrụpụta okpomọkụ W/mK 25
Nguzogide okpomọkụ nke okpomọkụ Δ (°C) 450-650
Okpomọkụ arụ ọrụ kacha Celsius C 1200
Mgbochi olu Ω·cm > 10 ^ 14
Dielectric Constant - 8.2
Ike Dielectric kV/mm 16