Uru nke ntọala granite n'ihe gbasara nguzogide vibration na nkwụsi ike na-ekpo ọkụ na akụrụngwa ịkpụ wafer.

N'ime usoro nke ụlọ ọrụ semiconductor na-aga n'ihu na usoro nrụpụta nanoscale, ịcha wafer, dị ka njikọ isi na nrụpụta mgbawa, nwere ihe siri ike chọrọ maka nkwụsi ike akụrụngwa. Ntọala granite, ya na nkwụsi ike nke ịma jijiji na nkwụsi ike ọkụ, aghọwo akụkụ bụ isi nke akụrụngwa ịkpụ wafer, na-enye nkwa a pụrụ ịdabere na ya maka ịnweta nhazi nhazi nke ọma na nke dị elu. ;

Njiri mara mma dị elu na mgbochi ịma jijiji: Chebe izi ezi ịkpụ ọkwa nano
Mgbe akụrụngwa na-egbutu wafer na-arụ ọrụ, ntụgharị ọsọ ọsọ nke spindle, ụda olu na-emegharị ngwa ngwa, na gburugburu ebe obibi na-emepụta site na ngwá ọrụ gburugburu ga-enwe mmetụta dị ukwuu na nkwụsị nke ziri ezi. The damping arụmọrụ nke omenala metal bases nwere oke, na-eme ka o siri ike ngwa ngwa attenuate vibrations, nke na-eduga na micron-larịị jitter nke igbutu ngwaọrụ na ozugbo na-akpata ntụpọ dị ka chipped n'ọnụ na cracks na wafers. Àgwà mmiri dị elu nke isi granite edoziwo nsogbu a n'ụzọ bụ isi. ;
A na-ejikọta kristal mineral nke dị n'ime nke granite, na-eme ka usoro mkpofu ike. Mgbe a na-ebufe vibration na isi, microstructure nke dị n'ime ya nwere ike gbanwee ike vibration ngwa ngwa ka ọ bụrụ ike ọkụ, na-enweta nkwụsị nke ọma nke ọma. Data nnwale na-egosi na n'okpuru otu ọnọdụ ịma jijiji, granite base nwere ike belata njupụta nke vibration karịa 90% n'ime 0.5 sekọnd, ebe ntọala metal chọrọ 3 ruo 5 sekọnd. Arụmọrụ damping a pụtara ìhè na-eme ka o doo anya na ngwá ọrụ ịkpụ ahụ ka kwụsiri ike n'oge usoro igbutu nanoscale, na-ekwe nkwa ịdị mma nke ịkpụ wafer na ibelata ọnụego mgbapu nke ọma. Dịka ọmụmaatụ, na usoro ịkpụ wafer 5nm, akụrụngwa nwere ntọala granite nwere ike ijikwa nha chipping n'ime 10μm, nke karịrị 40% dị elu karịa nke akụrụngwa nwere ntọala ọla. ;
Ọnụ ọgụgụ dị ala dị ala nke mgbasawanye ọkụ: na-eguzogide mmetụta nke mgbanwe okpomọkụ
N'oge a na-egbutu wafer, okpomọkụ na-emepụta site na esemokwu nke ngwá ọrụ ịkpụ, ikpo ọkụ na-arụ ọrụ ogologo oge nke ngwá ọrụ, na mgbanwe na okpomọkụ gburugburu ebe obibi ogbako nwere ike ime ka ọ bụrụ ihe na-eme ka okpomọkụ dị na akụrụngwa akụrụngwa. Ọnụọgụ nke thermal mgbasawanye nke dara ihe dịtụ elu (ihe dị ka 12 × 10⁻⁶ / ℃). Mgbe okpomọkụ na-agbanwe site na 5 ℃, ntọala ígwè dị mita 1 nwere ike ịmalite nrụrụ nke 60μm, na-eme ka ọnọdụ ịkpụ ahụ gbanwee ma na-emetụta nhụsianya nke ịkpụ. ;
Ọnụ ọgụgụ nke mgbasawanye ọkụ nke granite base bụ naanị (4-8) × 10⁻⁶ / ℃, nke na-erughị otu ụzọ n'ụzọ atọ nke ihe ọla. N'okpuru otu mgbanwe okpomọkụ, ọ fọrọ nke nta ka ọ bụrụ na a ga-eleghara mgbanwe akụkụ ya anya. The tụrụ data nke a ụfọdụ semiconductor n'ichepụta ụlọ ọrụ na-egosi na n'oge a 8-hour na-aga n'ihu elu-osisi wafer ọnwụ ọrụ, mgbe ambient okpomọkụ na-agbanwe site 10 ℃, mbelata ọnọdụ nkwụghachi nke akụrụngwa na a konkiri base bụ ihe na-erughị 20μm, mgbe nke akụrụngwa na a metal base karịa 60μm. Igwe ọkụ ọkụ a kwụsiri ike na-eme ka ọnọdụ dị n'etiti ngwaọrụ ịkpụ na wafer na-anọgide na-adị mma mgbe niile. Ọbụna n'okpuru ọrụ na-adịte aka na-aga n'ihu ma ọ bụ mgbanwe dị egwu na okpomọkụ gburugburu ebe obibi, enwere ike ịnọgide na-enwe nkwekọ nke igbutu ziri ezi. ;
Nkwụsi ike na iyi nguzogide: Gbaa mbọ hụ na arụ ọrụ akụrụngwa kwụsiri ike ogologo oge
Na mgbakwunye na uru nke nkwụsi ike nke vibration na nkwụsi ike nke okpomọkụ, ịdị elu dị elu ma na-eyi nkwụsi ike nke isi granite na-eme ka ntụkwasị obi nke ngwa ịkpụ wafer dịkwuo mma. Granite nwere isi ike nke 6 ruo 7 na Mohs yana ike mkpakọ karịrị 120MPa. Ọ nwere ike iguzogide nrụgide dị egwu na mmetụta mmetụta n'oge usoro ịkpụ ma ọ dịghị enwe ike imebi. Ka ọ dị ugbu a, nnukwu ihe owuwu ya na-enye ya ezigbo nguzogide iyi. Ọbụlagodi n'oge arụ ọrụ igbutu ugboro ugboro, elu nke isi anaghị adị mfe iyi, na-ahụ na akụrụngwa na-ejigide ọrụ nkenke dị elu ruo ogologo oge. ;
N'ime ngwa bara uru, ọtụtụ ụlọ ọrụ na-emepụta wafer emeela ka mkpụrụ ngwaahịa na nrụpụta ọrụ dị mma nke ukwuu site na iji akụrụngwa ịkpụ na ntọala granite. Data sitere na ebe a na-ahụ maka ụwa zuru ụwa ọnụ na-egosi na mgbe ewebatachara akụrụngwa granite, mkpụrụ osisi wafer abawanyela site na 88% ruo ihe karịrị 95%, agbatịla usoro mmezi akụrụngwa site na ugboro atọ, na-ebelata ọnụ ahịa mmepụta nke ọma na ịkwalite asọmpi ahịa. ;
N'ikpeazụ, granite base, yana ezigbo nguzogide vibration, nkwụsi ike nke okpomọkụ, nnukwu nkwụsi ike na nkwụsi ike na-eyi, na-enye nkwa arụmọrụ zuru oke maka ngwa ịkpụ wafer. Ka teknụzụ semiconductor na-aga n'ihu na nkenke dị elu, ntọala granite ga-arụ ọrụ dị mkpa karịa n'ọhịa nke nrụpụta wafer, na-akwalite mmepe mmepe ọhụrụ nke ụlọ ọrụ semiconductor.