Uru nke ntọala granite n'ihe gbasara iguzogide mkpọtụ na nkwụsi ike okpomọkụ na akụrụngwa ịkpụ wafer.

N'ime usoro mmepụta semiconductor na-aga n'ihu na usoro mmepụta nanoscale, ịkpụ wafer, dị ka njikọ dị mkpa na mmepụta chip, nwere ihe siri ike dị ukwuu maka iguzosi ike na akụrụngwa. Ntọala granite, yana nguzogide mkpọtụ ya dị egwu na nkwụsi ike okpomọkụ, aghọwo akụkụ bụ isi nke akụrụngwa ịkpụ wafer, na-enye nkwa a pụrụ ịdabere na ya maka inweta nhazi wafer dị elu na arụmọrụ dị elu.

Njirimara dị elu nke ime ka mmiri damping na mgbochi ịma jijiji: Ichekwa izi ezi nke ịkpụ ọkwa nano
Mgbe ngwa ịkpụ wafer na-arụ ọrụ, ntụgharị ọsọ ọsọ nke spindle, mkpọtụ ugboro ugboro nke ngwa ịkpụ, na mkpọtụ gburugburu ebe obibi nke ngwa ndị gbara ya gburugburu na-emepụta ga-enwe mmetụta dị ukwuu na izi ezi nke ịkpụ. Arụmọrụ mbelata nke ntọala ígwè ọdịnala pere mpe, na-eme ka ọ sie ike ibelata mkpọtụ ngwa ngwa, nke na-eduga na mkpọtụ micron-level nke ngwaọrụ ịkpụ ma na-ebute ntụpọ ozugbo dịka nsọtụ gbawara agbawa na mgbawa na wafers. Àgwà dị elu nke ịdọrọ granite edoziwo nsogbu a nke ọma.
A na-ejikọta kristal mineral dị n'ime granite nke ọma, na-emepụta usoro mwepụ ike eke. Mgbe a na-ebufe mkpọtụ ahụ na ntọala ahụ, obere nhazi ya nwere ike ịgbanwe ike mkpọtụ ahụ ka ọ bụrụ ike okpomọkụ ngwa ngwa, na-enweta mbelata mkpọtụ dị irè. Data nnwale na-egosi na n'okpuru otu gburugburu ebe ahụ, ntọala granite nwere ike ibelata oke mkpọtụ ahụ site na ihe karịrị 90% n'ime sekọnd 0.5, ebe ntọala ígwè ahụ chọrọ sekọnd 3 ruo 5. Arụmọrụ nhicha dị egwu a na-eme ka ngwaọrụ ịkpụ ahụ guzosie ike n'oge usoro ịkpụ nanoscale, na-ekwe nkwa na akụkụ dị nro nke ịkpụ wafer ma na-ebelata ọnụego mgbawa nke ọma. Dịka ọmụmaatụ, na usoro ịkpụ wafer 5nm, akụrụngwa nwere ntọala granite nwere ike ijikwa nha mgbawa n'ime 10μm, nke karịrị 40% karịa nke ngwaọrụ nwere ntọala ígwè.
Oke obere nke mgbasawanye okpomọkụ: Na-eguzogide mmetụta nke mgbanwe okpomọkụ
N'oge usoro ịkpụ wafer, okpomọkụ nke ihe eji egbutu ihe na-akpata, okpomọkụ nke na-apụ n'anya site n'ọrụ ogologo oge nke akụrụngwa ahụ, na mgbanwe na okpomọkụ gburugburu ebe obibi nwere ike ibute mgbanwe okpomọkụ nke ihe akụrụngwa ahụ. Oke nke mgbasawanye okpomọkụ nke ihe igwe dị elu dị elu (ihe dị ka 12 × 10⁻⁶/℃). Mgbe okpomọkụ gbanwere site na 5℃, ntọala ígwè nke mita 1 nwere ike ịgbanwe nke 60μm, na-eme ka ọnọdụ ịkpụ ahụ gbanwee ma na-emetụta nke ukwuu izi ezi nke ịkpụ ahụ.
Oke mgbasawanye okpomọkụ nke ntọala granite bụ naanị (4-8) ×10⁻⁶/℃, nke na-erughị otu ụzọ n'ụzọ atọ nke ihe ígwè. N'okpuru otu mgbanwe okpomọkụ ahụ, enwere ike ileghara mgbanwe nha ya anya. Data a tụrụ nke ụlọ ọrụ mmepụta semiconductor na-egosi na n'oge ọrụ ịkpụ wafer dị elu na-aga n'ihu nke awa 8, mgbe okpomọkụ gburugburu na-agbanwe site na 10℃, nkwụsị ọnọdụ ịkpụ nke akụrụngwa nwere ntọala granite erughị 20μm, ebe nke akụrụngwa nwere ntọala ígwè karịrị 60μm. Arụmọrụ okpomọkụ a na-eme ka o doo anya na ọnọdụ dị n'etiti ngwaọrụ ịkpụ na wafer ka dị mma n'oge niile. Ọbụna n'okpuru ọrụ na-aga n'ihu ogologo oge ma ọ bụ mgbanwe dị ukwuu na okpomọkụ gburugburu ebe obibi, enwere ike ịnọgide na-enwe nguzozi nke izi ezi ịkpụ.
Nguzogide siri ike na iyi: Hụ na akụrụngwa ahụ na-arụ ọrụ ogologo oge
Tinyere uru nke iguzogide mkpọtụ na nkwụsi ike okpomọkụ, oke ike na nguzogide iyi nke ntọala granite na-eme ka ntụkwasị obi nke ngwa ịkpụ wafer dịkwuo elu. Granite nwere ike nke 6 ruo 7 na nha Mohs na ike nrụgide karịrị 120MPa. Ọ nwere ike iguzogide nrụgide na ike mmetụta dị ukwuu n'oge usoro ịkpụ ma ọ naghị adị mfe ịgbanwe. Ka ọ dị ugbu a, nhazi ya dị oke njọ na-enye ya ezigbo nguzogide iyi. Ọbụna n'oge ọrụ ịkpụ ihe ugboro ugboro, elu nke ntọala ahụ anaghị adị mfe iyi, na-eme ka akụrụngwa ahụ nọgide na-arụ ọrụ nke ọma ruo ogologo oge.
N'ọrụ bara uru, ọtụtụ ụlọ ọrụ mmepụta wafer emeela ka mmepụta ngwaahịa na mmepụta ya ka mma nke ukwuu site n'iji ngwa ịkpụ ihe na ntọala granite. Data sitere na ụlọ ọrụ nrụpụta ihe a ma ama n'ụwa niile na-egosi na mgbe ewebatara ngwa ịkpụ ihe na ntọala granite, mkpụrụ ịkpụ ihe na wafer amụbaala site na 88% ruo ihe karịrị 95%, usoro mmezi akụrụngwa agbatịala ugboro atọ, na-ebelata ọnụ ahịa mmepụta nke ọma ma na-eme ka asọmpi ahịa dịkwuo mma.
Na mmechi, ntọala granite, ya na ezigbo mgbochi mkpọtụ ya, nkwụsi ike okpomọkụ, ike siri ike na iguzogide iyi, na-enye nkwa arụmọrụ zuru oke maka akụrụngwa ịkpụ wafer. Ka teknụzụ semiconductor na-aga n'ihu na nkenke dị elu, ntọala granite ga-arụ ọrụ dị mkpa karị n'ọhịa nke imepụta wafer, na-akwalite mmepe ọhụrụ na-aga n'ihu nke ụlọ ọrụ semiconductor.