1. Izi ezi nha
Ịdị larịị: ịdị larịị nke elu ntọala kwesịrị iru ọkwa dị elu, njehie ịdị larịị ekwesịghịkwa ịgafe ±0.5μm na mpaghara 100mm × 100mm ọ bụla; Maka elu ntọala dum, a na-achịkwa njehie ịdị larịị n'ime ±1μm. Nke a na-eme ka akụkụ dị mkpa nke akụrụngwa semiconductor, dị ka isi ikpughe nke akụrụngwa lithography na tebụl nyocha nke ngwaọrụ nchọpụta chip, nwee ike itinye ma rụọ ọrụ nke ọma na mbara igwe dị oke mma, hụ na ụzọ anya na njikọ sekit nke akụrụngwa ziri ezi, ma zere mgbanwe mbugharị nke ihe ndị sitere na mbara igwe na-adịghị mma nke ntọala ahụ kpatara, nke na-emetụta mmepụta na izi ezi nke chip semiconductor.
Ịkwụ ọtọ: Ịkwụ ọtọ nke nsọtụ ọ bụla nke ntọala dị oke mkpa. N'akụkụ ogologo, njehie kwụ ọtọ agaghị agafe ±1μm kwa 1m; A na-achịkwa njehie kwụ ọtọ nke diagonal n'ime ±1.5μm. Dịka ọmụmaatụ, site na iji igwe lithography dị oke nkenke, mgbe tebụl na-agagharị n'akụkụ okporo ụzọ nduzi nke ntọala ahụ, ịdị larịị nke nsọtụ ntọala ahụ na-emetụta kpọmkwem izi ezi nke tebụl ahụ. Ọ bụrụ na ịdị larịị adịghị mma, ụkpụrụ lithography ga-agbagọ ma gbanwee, nke na-eme ka mbelata nke mmepụta chip.
Nlekota: E kwesịrị ijikwa njehie paramitalism nke elu na ala nke ntọala ahụ n'ime ±1μm. Nlekota dị mma nwere ike ijide n'aka na etiti ike ndọda zuru oke mgbe etinyere akụrụngwa ahụ, ike nke akụkụ ọ bụla dịkwa otu. Na ngwa mmepụta wafer semiconductor, ọ bụrụ na elu na ala nke ntọala ahụ adịghị nhata, wafer ahụ ga-ada ada n'oge nhazi, na-emetụta otu usoro dị ka ịcha na mkpuchi, ma si otú a na-emetụta nguzozi arụmọrụ chip.
Nke abụọ, njirimara ihe onwunwe
Ike: Ike nke ihe e ji granite mee kwesịrị iru ike Shore HS70 ma ọ bụ karịa. Ike siri ike dị elu nwere ike iguzogide iyi nke na-esi na mmegharị ugboro ugboro na esemokwu nke ihe ndị mejupụtara ya apụta n'oge ọrụ nke akụrụngwa ahụ, na-eme ka ntọala ahụ nwee ike ịnọgide na-enwe oke ziri ezi mgbe ejiri ya ogologo oge. N'ime ngwa nkwakọ ngwaahịa chip, ogwe aka robot na-ejide ma na-etinye chip ahụ na ntọala ahụ, ike siri ike nke ntọala ahụ nwekwara ike ime ka elu ahụ ghara ịdị mfe ịmepụta ọkọ ma nọgide na-enwe izi ezi nke mmegharị aka robot ahụ.
Njupụta: Njupụta ihe kwesịrị ịdị n'etiti 2.6-3.1 g/cm³. Njupụta kwesịrị ekwesị na-eme ka ntọala ahụ nwee ezigbo nkwụsi ike, nke nwere ike ijide n'aka na ọ siri ike zuru oke iji kwado akụrụngwa ahụ, ọ gaghị eweta nsogbu na ntinye na mbugharị nke akụrụngwa ahụ n'ihi oke ibu. Na nnukwu ngwa nyocha semiconductor, njupụta ntọala kwụsiri ike na-enyere aka belata mbufe mkpọtụ n'oge ọrụ akụrụngwa ma melite izi ezi nchọpụta.
Nkwụsi ike nke okpomọkụ: ọnụọgụ mgbasa nke linear erughị 5 × 10⁻⁶/℃. Ngwa semiconductor na-enwe mmetụta dị ukwuu na mgbanwe okpomọkụ, nkwụsi ike nke ntọala ahụ na-ejikọkwa kpọmkwem na izi ezi nke akụrụngwa ahụ. N'oge usoro lithography, mgbanwe okpomọkụ nwere ike ibute mgbasawanye ma ọ bụ mkpụkọ nke ntọala ahụ, na-ebute mgbanwe na nha nke ụkpụrụ ikpughe. Ntọala granite nwere obere mmụba linear nwere ike ijikwa mgbanwe nha na obere oke mgbe okpomọkụ ọrụ nke akụrụngwa gbanwere (n'ozuzu 20-30 ° C) iji hụ na lithography ziri ezi.
Nke atọ, àgwà elu
Nchacha: Nchacha elu Ra uru dị na ntọala anaghị agafe 0.05μm. Elu dị nro nke ukwuu nwere ike ibelata mmịpụta nke uzuzu na ihe ndị na-adịghị ọcha ma belata mmetụta na ịdị ọcha nke gburugburu ebe a na-emepụta chip semiconductor. N'ime ụlọ ọrụ mmepụta chip nke na-enweghị uzuzu, obere ihe nwere ike ibute ntụpọ dị ka obere sekit nke chip, elu dị nro nke ntọala ahụ na-enyekwa aka idobe gburugburu ebe obibi dị ọcha nke ụlọ ọrụ ahụ ma melite mmepụta chip.
Ntụpọ microscopic: A naghị ekwe ka elu ntọala ahụ nwee mgbawa ọ bụla a na-ahụ anya, oghere ájá, oghere na ntụpọ ndị ọzọ. N'ọkwa microscopic, ọnụọgụ ntụpọ nwere dayameta karịrị 1μm kwa square centimita agaghị agafe 3 site na microscopy elektrọn. Ntụpọ ndị a ga-emetụta ike nhazi na ịdị larịị nke ntọala ahụ, wee metụta nkwụsi ike na izi ezi nke akụrụngwa ahụ.
Nke anọ, nkwụsi ike na iguzogide ujo
Nkwụsi ike nke na-agbanwe agbanwe: N'ime gburugburu ebe a na-emegharị ahụ nke ọrụ nke ngwaọrụ semiconductor (oke ugboro ịma jijiji 10-1000Hz, oke 0.01-0.1mm), a ga-achịkwa mmegharị mkpọtụ nke isi ihe ndị dị na ntọala ahụ n'ime ±0.05μm. Site na iji ngwa nnwale semiconductor dị ka ihe atụ, ọ bụrụ na e bufee mkpọtụ nke ngwaọrụ ahụ na gburugburu ya na ntọala ahụ n'oge ọrụ, a ga-egbochi izi ezi nke mgbaàmà nnwale ahụ. Ezigbo nkwụsi ike nke na-agbanwe agbanwe nwere ike hụ na nsonaazụ nnwale a pụrụ ịtụkwasị obi.
Nguzogide nke ala ọma jijiji: Ntọala ahụ aghaghị inwe arụmọrụ ala ọma jijiji dị mma, ọ nwekwara ike ibelata ike ịma jijiji ngwa ngwa mgbe a na-ama jijiji mpụga mberede (dịka ịma jijiji nke ebili mmiri ala ọma jijiji), ma hụ na ọnọdụ nke ihe ndị dị mkpa nke akụrụngwa ahụ na-agbanwe n'ime ±0.1μm. N'ụlọ ọrụ semiconductor na mpaghara ala ọma jijiji na-adịkarị, ntọala ndị na-eguzogide ala ọma jijiji nwere ike ichebe akụrụngwa semiconductor dị oke ọnụ, na-ebelata ihe egwu nke mmebi akụrụngwa na mmebi mmepụta n'ihi ịma jijiji.
5. Nkwụsi ike nke kemịkalụ
Nguzogide Ncha: Ntọala granite kwesịrị iguzogide ncha nke ihe ndị na-emepụta kemịkalụ nkịtị n'usoro mmepụta semiconductor, dịka hydrofluoric acid, aqua regia, wdg. Mgbe etinyere ya na mmiri hydrofluoric acid nke nwere oke oke nke 40% ruo awa 24, ọnụego mfu nke ịdị mma elu agaghị agafe 0.01%; Tinye ya na aqua regia (oke olu nke hydrochloric acid na nitric acid 3:1) ruo awa 12, ọ dịghịkwa ihe doro anya nke nchara n'elu. Usoro mmepụta semiconductor gụnyere ọtụtụ usoro nhicha kemịkalụ na nhicha, ezigbo nguzogide nchara nke ntọala ahụ nwere ike ijide n'aka na ojiji ogologo oge na gburugburu kemịkalụ anaghị emebi emebi, a na-ejikwa izi ezi na iguzosi ike n'ezi ihe nke ntọala ahụ.
Mgbochi Mmetọ: Ihe e ji mee ihe n'okpuru ala anaghị anabata ihe ndị na-emerụ emerụ n'ebe a na-emepụta semiconductor, dịka gas organic, ion metal, wdg. Mgbe e tinyere ya n'ime gburugburu ebe nwere 10 PPM nke gas organic (dịka ọmụmaatụ, benzene, toluene) na 1ppm nke ion metal (dịka ọmụmaatụ, ion copper, ion iron) ruo awa 72, mgbanwe arụmọrụ nke mmịpụta nke ihe ndị na-emerụ emerụ n'elu ala adịghị mma. Nke a na-egbochi ihe ndị na-emerụ emerụ ịkwaga site na elu ala gaa na mpaghara mmepụta chip ma na-emetụta ịdị mma nke chip.
Oge ozi: Maachị-28-2025