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N'ihe gbasara imepụta semiconductor, nkenke bụ ụzọ kachasị mma isi mee ka ngwaahịa dị mma ma rụọ ọrụ nke ọma. Ngwa nhazi semiconductor, dịka njikọ dị mkpa iji hụ na mmepụta ya ziri ezi, na-etinye ihe fọrọ nke nta ka ọ bụrụ ihe siri ike na nkwụsi ike nke ihe ndị dị na ya. N'ime ha, ikpo okwu granite, yana nkwụsi ike okpomọkụ ya pụrụ iche, na-arụ ọrụ dị mkpa na ngwa nhazi semiconductor. Isiokwu a ga-eme nyocha miri emi nke arụmọrụ nkwụsi ike okpomọkụ nke ikpo okwu granite na ngwa nhazi semiconductor site na data nnwale n'ezie.
Ihe ndị siri ike achọrọ maka nkwụsi ike okpomọkụ nke akụrụngwa nha na mmepụta semiconductor
Usoro mmepụta semiconductor dị oke mgbagwoju anya ma doo anya, obosara nke ahịrị sekit dị na mgbawa ahụ abanyela na ọkwa nanometer. N'ime usoro nrụpụta dị oke mma, ọbụna obere mgbanwe okpomọkụ nwere ike ibute mgbasawanye okpomọkụ na mkpụkọ nke akụrụngwa, si otú a na-akpali njehie nha. Dịka ọmụmaatụ, na usoro photolithography, ọ bụrụ na izi ezi nke ngwa nha ewepụ site na 1 nanometer, ọ nwere ike ibute nsogbu dị njọ dị ka sekit dị mkpụmkpụ ma ọ bụ sekit mepere emepe na sekit dị na mgbawa ahụ, na-eduga na mkpochapụ nke mgbawa ahụ. Dịka ọnụ ọgụgụ data ụlọ ọrụ si dị, maka mgbanwe ọ bụla na okpomọkụ 1℃, ikpo okwu ngwaọrụ nha ihe ọla ọdịnala nwere ike ịgbanwe nha nke ọtụtụ nanometers. Agbanyeghị, nrụpụta semiconductor chọrọ ka achịkwa izi ezi nha n'ime ±0.1 nanometers, nke na-eme ka nkwụsi ike okpomọkụ bụrụ isi ihe na-ekpebi ma ngwa nha nwere ike imezu ihe achọrọ nke nrụpụta semiconductor.

Uru echiche nke nkwụsi ike okpomọkụ nke ikpo okwu granite
Granite, dị ka ụdị nkume eke, nwere obere kristal mineral dị n'ime, nke nwere nhazi siri ike ma dịkwa otu, ma nwee uru ebumpụta ụwa nke nkwụsi ike okpomọkụ. N'ihe gbasara oke mmụba okpomọkụ, oke mmụba okpomọkụ nke granite dị oke ala, n'ozuzu ya sitere na 4.5 ruo 6.5 × 10⁻⁶/K. N'ụzọ dị iche, oke mmụba okpomọkụ nke ihe ọla nkịtị dị ka alloys aluminum dị elu ruo 23.8 × 10⁻⁶/K, nke bụ ọtụtụ ugboro karịa granite. Nke a pụtara na n'okpuru otu ọnọdụ mgbanwe okpomọkụ ahụ, mgbanwe nha nke ikpo okwu granite dị obere karịa nke ikpo okwu ígwè, nke nwere ike inye ntụaka nha kwụsiri ike maka akụrụngwa nha semiconductor.
Tinyere nke ahụ, nhazi kristal nke granite na-enye ya otu nha anya dị mma nke nnyefe okpomọkụ. Mgbe ọrụ akụrụngwa na-emepụta okpomọkụ ma ọ bụ mgbanwe okpomọkụ gburugburu, ikpo okwu granite nwere ike ibupụ okpomọkụ ngwa ngwa na nke ọma, na-ezere oke okpomọkụ mpaghara ma ọ bụ ihe na-eme ka oyi ju oke, si otú a na-eme ka okpomọkụ zuru oke nke ikpo okwu ahụ dịgide ma na-eme ka o doo anya na nha nha kwụsiri ike.
Usoro na usoro nke nha nkwụsi ike okpomọkụ
Iji nyochaa nke ọma ọnọdụ okpomọkụ nke ikpo okwu granite na ngwa nha semiconductor, anyị emepụtala atụmatụ nha siri ike. Họrọ ngwa nha wafer semiconductor dị oke nkenke, nke nwere ikpo okwu granite a haziri nke ọma. N'ebe nnwale, e mere ka ụdị mgbanwe okpomọkụ a na-ahụkarị na ogbako mmepụta semiconductor, ya bụ, na-ekpo ọkụ nwayọ nwayọ site na 20℃ ruo 35℃ wee jụọ oyi ruo 20℃. Usoro ahụ dum were awa 8.
N'elu ikpo okwu granite nke ngwa nha, a na-etinye wafer silicon ọkọlọtọ dị oke nkenke, a na-ejikwa ihe mmetụta mgbanwe nwere izi ezi nanoscale iji nyochaa mgbanwe ọnọdụ dị n'etiti wafer silicon na ikpo okwu ahụ n'oge. Ka ọ dị ugbu a, a na-ahazi ọtụtụ ihe mmetụta okpomọkụ dị oke nkenke n'ọnọdụ dị iche iche n'elu ikpo okwu ahụ iji nyochaa nkesa okpomọkụ n'elu ikpo okwu ahụ. N'oge nnwale ahụ, e dekọrọ data mwepụ na data okpomọkụ kwa nkeji iri na ise iji hụ na data ahụ zuru oke ma zie ezi.
Atụle data na nyocha nsonaazụ
Mmekọrịta dị n'etiti mgbanwe okpomọkụ na mgbanwe nha ikpo okwu
Data nnwale na-egosi na mgbe okpomọkụ rịrị elu site na 20℃ ruo 35℃, mgbanwe na nha linear nke ikpo okwu granite dị obere nke ukwuu. Mgbe agbakọchara, n'oge usoro kpo oku dum, mgbasawanye linear kachasị nke ikpo okwu ahụ bụ naanị 0.3 nanomita, nke dị ala karịa oke nnabata njehie maka izi ezi nha na usoro mmepụta semiconductor. N'oge ọkwa oyi, nha ikpo okwu nwere ike ịlaghachi kpamkpam na ọnọdụ mbụ, a pụkwara ileghara ihe ngosi lag nke mgbanwe nha anya. Àgwà a nke ịnọgide na-enwe mgbanwe dị ala nke ukwuu ọbụlagodi n'okpuru nnukwu mgbanwe okpomọkụ na-egosi nke ọma nkwụsi ike okpomọkụ dị egwu nke ikpo okwu granite.
Nyocha nke nha nha okpomọkụ n'elu ikpo okwu
Data nke ihe mmetụta okpomọkụ chịkọtara na-egosi na n'oge ọrụ nke akụrụngwa na usoro mgbanwe okpomọkụ, nkesa okpomọkụ n'elu ikpo okwu granite ahụ dị otu. Ọbụna n'oge ọkwa mgbe okpomọkụ na-agbanwe nke ukwuu, ọdịiche okpomọkụ dị n'etiti ebe nha ọ bụla dị n'elu ikpo okwu ahụ na-achịkwa mgbe niile n'ime ±0.1℃. Nkesa okpomọkụ otu otu na-ezere mgbanwe ikpo okwu nke nrụgide okpomọkụ na-adịghị mma kpatara, na-ahụ na elu ntụaka nha ahụ dị larịị ma kwụsie ike, ma na-enye gburugburu nha a pụrụ ịdabere na ya maka akụrụngwa metrology semiconductor.
Ma e jiri ya tụnyere nyiwe ihe ọdịnala
E jiri data a tụrụ atụ nke ikpo okwu granite tụnyere nke ngwaọrụ nha semiconductor nke otu ụdị ahụ site na iji ikpo okwu alloy aluminom, ọdịiche dị iche iche dịkwa oke mkpa. N'okpuru otu ọnọdụ mgbanwe okpomọkụ ahụ, mgbasawanye ahịrị nke ikpo okwu alloy aluminom dị elu ruo nanomita 2.5, nke karịrị ugboro asatọ nke ikpo okwu granite. Ka ọ dị ugbu a, nkesa okpomọkụ n'elu ikpo okwu alloy aluminom adịghị nhata, yana ọdịiche okpomọkụ kachasị elu na-eru 0.8℃, na-ebute mgbanwe doro anya nke ikpo okwu ahụ ma na-emetụta izi ezi nha nke ukwuu.
N'ụwa kpọmkwem nke akụrụngwa metrology semiconductor, ikpo okwu granite, yana nkwụsi ike okpomọkụ ha pụrụ iche, aghọwo isi ihe na-eme ka nha nha ziri ezi. Data a tụrụ na-egosi nke ọma arụmọrụ pụrụ iche nke ikpo okwu granite n'ịzaghachi mgbanwe okpomọkụ, na-enye nkwado teknụzụ a pụrụ ịdabere na ya maka ụlọ ọrụ mmepụta semiconductor. Ka usoro mmepụta semiconductor na-aga n'ihu na nkenke ka elu, uru nkwụsi ike okpomọkụ nke ikpo okwu granite ga-apụta ìhè, na-akwalite mmepụta teknụzụ na mmepe na ụlọ ọrụ ahụ mgbe niile.
Oge ozi: Mee-13-2025
