Linear moto + granite base: isi ihe nzuzo nke ọgbọ ọhụrụ nke sistemụ mbufe wafer.

N'ime ahịrị ziri ezi nke nrụpụta semiconductor, usoro mbufe wafer dị ka "Lifeline nke ahịrị mmepụta mgbawa", na nkwụsi ike ya na izi ezi ya na-ekpebi ọnụọgụ mkpụrụ nke ibe. Ọgbọ ọhụrụ nke sistemụ mbufe wafer na-ejikọta moto linear na ntọala granite, yana uru pụrụ iche nke ihe granite bụ kpọmkwem koodu bụ isi iji kpọghee nnyefe dị elu.

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Granite base: Iwulite "ntọala nkume siri ike" maka nnyefe kwụsiri ike
Granite, ebe ọ meworo ọtụtụ narị nde afọ nke nhazi ala ala, na-egosipụta kristal mineral dị n'ime na otu. Njirimara okike a na-eme ka ọ bụrụ ihe ndabere maka usoro mbufe wafer. Na mgbagwoju anya gburugburu nke semiconductor cleanrooms, konkiri, na ya ultra-obere ọnụọgụ nke thermal mgbasa (naanị 5-7 ×10⁻⁶ / ℃), nwere ike iguzogide okpomọkụ eme n'oge ngwá ọrụ na mmetụta nke gburugburu ebe obibi okpomọkụ mgbanwe, n'ịhụ nkwụsi ike nke isi size na-ezere nnyefe ụzọ deviation kpatara site thermal deformation. Ya pụtara ìhè vibration damping arụmọrụ nwere ike ngwa ngwa banye n'ibu vibrations eme n'oge mmalite, shutdown na osooso nke linear Motors, nakwa dị ka mpụga nnyonye anya wetara site ọrụ nke ndị ọzọ ngwá na ogbako, na-enye a kwụsiri ike ikpo okwu na "efu ịma jijiji" maka wafer nnyefe. ;
Ka ọ dị ugbu a, nkwụsi ike nke kemịkalụ nke granite na-eme ka ọ ghara imebi ma ọ bụ nchara na semiconductor ogbako ebe acid na alkali reagents na-agbanwe agbanwe na ịdị ọcha dị elu chọrọ, si otú a na-ezere mmetụta na nnyefe ziri ezi n'ihi ihe ịka nká ma ọ bụ mgbasa ozi mmetọ. Àgwà ọma dị n'elu na nke siri ike nwere ike belata nchikota uzuzu n'ụzọ dị irè, na-ezute ụkpụrụ ụlọ dị ọcha na-enweghị uzuzu ma wepụ ihe ize ndụ nke mmetọ wafer site na mgbọrọgwụ. ;
Mmetụta "mmekọrịta ọla edo" nke moto linear na granite
Linear Motors, nke nwere njiri mara nke enweghị ikike nnyefe igwe, ngwa ngwa dị elu na ọsọ nzaghachi dị elu, na-enye nnyefe wafer na uru nke "ngwa ngwa, ziri ezi na kwụsie ike". Ntọala granite na-enye usoro nkwado siri ike na ntụkwasị obi maka ya. Ha abụọ na-arụkọ ọrụ ọnụ iji nweta mmụba na arụmọrụ. Mgbe moto linear na-eme ka onye na-ebu wafer na-agba ọsọ na granite base track, ike siri ike na nkwụsi ike nke ntọala ahụ na-eme ka nnyefe nke moto na-anya ụgbọ ala na-arụ ọrụ nke ọma, na-ezere nkwụsị ike ma ọ bụ nkwụsị nnyefe kpatara site na nrụrụ ntọala. ;
N'ịbụ ndị na-achọ maka izi ezi nanoscale, moto linear nwere ike nweta njikwa nchụpụ sub-micron. The elu-nkenke nhazi njirimara nke granite bases (na flatness njehie na-achịkwa n'ime ± 1μm) n'ụzọ zuru okè dakọtara na kpọmkwem akara nke linear Motors, jikọrọ ọnụ hụ na n'ọnọdu ọnọdụ n'oge wafer nnyefe bụ ihe na-erughị ± 5μm. Ma ọ bụ elu-ọsọ shuttling n'etiti dị iche iche usoro ngwá ma ọ bụ kpọmkwem ebe a na-adọba ụgbọala maka wafer handover, Nchikota linear Motors na konkiri bases nwere ike hụ na "efu deviation na efu jitter" na wafer nnyefe. ;
Nnwale omume ụlọ ọrụ: Mmelite ugboro abụọ na arụmọrụ yana ọnụego mkpụrụ
Mgbe emelitechara sistemụ mbufe wafer ya, ụlọ ọrụ na-eduga semiconductor zuru ụwa ọnụ nakweere usoro ntanetị moto + granite base, nke mụbara arụmọrụ mbufe wafer site na 40%, belata ọnụego mmejọ nke mmejọ dị ka nkukota na nkwụghachi n'oge usoro mbufe site na 85%, wee kwalite mkpokọta mkpụrụ nke ibe site na 6%. N'azụ data ahụ bụ nkwa nke nkwụsi ike nke nnyefe nyere site na isi granite na mmetụta dị elu na kpọmkwem synergy nke moto linear, nke na-ebelata ihe efu na njehie na usoro nnyefe wafer. ;
Site na ihe onwunwe ruo n'ichepụta nkenke, site na uru arụmọrụ ruo na nkwenye bara uru, njikọ nke moto linear na granite bases akọwapụtaghachila ụkpụrụ nke usoro mbufe wafer. N'ọdịnihu mgbe teknụzụ semiconductor na-aga n'ihu na usoro 3nm na 2nm, ihe granite ga-aga n'ihu na-etinye mkpali siri ike na mmepe ụlọ ọrụ ahụ site na uru ha na-enweghị atụ.