N'ihe gbasara imepụta semiconductor, nkenke sub-micron bụ isi ihe iji hụ na arụ ọrụ mgbawa, na (ZHHIMG®) granite base, ya na ihe onwunwe ya, nhazi ziri ezi na imepụta ihe ọhụrụ, aghọwo ihe bụ isi na-ekwe nkwa iji nweta nkenke a.
Site n'echiche nke ihe onwunwe, granite ojii nke ZHHIMG® họọrọ nwere njupụta nke ihe dịka 3100kg/m³, nwere nnukwu nhazi dị n'ime. Njupụta a dị elu na-enye ya nkwụsi ike na nkwụsi ike pụtara ìhè. N'oge a na-arụ ọrụ nke semiconductor akụrụngwa, ntụgharị nke moto na mmegharị nke akụrụngwa n'ime akụrụngwa ga-emepụta vibrations. Ntọala granite nwere ike ịmịkọrọ ihe karịrị 90% nke ike ịma jijiji nke ọma, na-ebelata mmetụta nke ịma jijiji na izi ezi nke akụrụngwa. Ka ọ dị ugbu a, ọnụ ọgụgụ ya dị oke ala nke mgbasawanye thermal na-enyere ya aka idobe nrụrụ ya n'ime obere oke mgbe ọnọdụ okpomọkụ na-agbanwe, na-enye ntọala nkwado siri ike maka akụrụngwa semiconductor na igbochi nchụpụ nke akụrụngwa n'ihi mgbanwe okpomọkụ, nke nwere ike imetụta izi ezi.
N'ihe gbasara nhazi na n'ichepụta, ụlọ ọrụ ZHHIMG® na-anakwere ngwá ọrụ nhazi nke mba ụwa ma nwee nnukwu igwe igwe anọ buru ibu (igwe ọ bụla na-efu ihe karịrị 500,000usd), nke nwere ike ịrụ ọrụ nkenke na granite. Site ise njikọ CNC machining na ndị ọzọ usoro, flatness nke igwe isi nwere ike iru nanometer larịị, na-enye ihe ultra-flat ntụaka n'elu maka echichi nke semiconductor akụrụngwa na n'ịhụ kpọmkwem n'ọnọdu nke ọ bụla akụrụngwa nke akụrụngwa. Ọzọkwa, ụlọ ọrụ okpomọkụ na iru mmiri na-adịgide adịgide (na-ekpuchi ebe dị mita 10,000) na-enye ebe kwụsiri ike maka nhazi. 500mm n'obosara na 2000mm miri mgbochi mgbochi trenches gburugburu ya, yana cranes nkịtị, na-ekewapụ nnyonye anya mpụga nke ọma ma hụ na nhazi nhazi nke ntọala igwe.
Tụkwasị na nke ahụ, ZHHIMG® nwekwara ikike nhazi nhazi siri ike. Maka ihe ndị pụrụ iche nke akụrụngwa semiconductor, enwere ike ịmebe oghere nrụnye na eriri USB iji nweta nkwekọ zuru oke n'etiti akụrụngwa na isi. N'otu oge ahụ, yana njikọta na metrology klaasị ụwa na akụrụngwa nnwale dị ka German Mahr nkeji nlele (nke ziri ezi nke 0.5um) na Switzerland WYLER eletrọnịkị, a na-enyocha ntọala igwe ahụ nke ọma ma hazie ya iji hụ na ntọala igwe ọ bụla nwere ike mezuo ihe achọrọ siri ike nke akụrụngwa semiconductor maka izi ezi ọkwa sub-micron.
Ọ bụ kpọmkwem nchikota nke uru ndị a na-eme ka ZHHIMG® granite base bụ nhọrọ a pụrụ ịdabere na ya maka inweta nkenke sub-micron na ngwa semiconductor, na-enyere aka ịmepụta semiconductor na-aga n'ihu n'ọhịa dị elu.
Oge nzipu: Jun-18-2025