N'ihe gbasara nnyocha wafer semiconductor, ịdị ọcha nke gburugburu ebe obibi dị ọcha metụtara mmepụta ngwaahịa. Ka usoro mmepụta chip na-aga n'ihu na-akawanye mma, ihe achọrọ maka ikpo okwu ebu nke ngwa nchọpụta na-aghọwanye ihe siri ike. Ikpo okwu granite, nke nwere njirimara ha nke ntọhapụ ion ígwè efu na obere mmetọ ihe, agafeela ihe eji eme ígwè anaghị agba nchara ma bụrụ ihe ngwọta kachasị mma maka ngwa nyocha wafer.
Granite bụ nkume e ji ihe ndị na-abụghị ọla mee nke mejupụtara ya, nke bụ isi ihe mejupụtara ya bụ mineral ndị na-abụghị ọla dịka quartz, feldspar na mica. Ihe a na-enye ya uru nke ntọhapụ ion ígwè efu. N'ụzọ dị iche, ígwè anaghị agba nchara, dịka ihe mgbakwunye nke ọla dị ka ígwè, chromium na nickel, na-enwekarị mmebi electrochemical n'elu ya n'ihi mbibi nke uzuoku mmiri na gas acidic ma ọ bụ alkaline na gburugburu ebe obibi dị ọcha, na-ebute mmiri ozuzo nke ion ígwè dị ka Fe²⁺ na Cr³⁺. Ozugbo obere ion ndị a jikọtara na elu nke wafer ahụ, ha ga-agbanwe ihe onwunwe eletriki nke ihe semiconductor na usoro ndị na-esote dịka photolithography na etching, na-akpata mgbanwe voltaji nke transistor, ma na-edugakwa na sekit dị mkpụmkpụ na sekit ahụ. Data nnwale ụlọ ọrụ ọkachamara na-egosi na mgbe ikpo okwu granite ahụ na-aga n'ihu na gburugburu okpomọkụ ụlọ dị ọcha na iru mmiri (23±0.5℃, 45%±5% RH) ruo awa 1000, ntọhapụ nke ion ígwè dị ala karịa oke nchọpụta (< 0.1ppb). Ọnụego ntụpọ nke wafers nke mmetọ ion ígwè kpatara mgbe ejiri ikpo okwu ígwè anaghị agba nchara mee ihe nwere ike ịdị elu dịka 15% ruo 20%.
Maka njikwa mmetọ ihe ndị dị n'ime ya, ikpo okwu granite na-arụkwa ọrụ nke ọma. Ụlọ nhicha nwere nnukwu ihe achọrọ maka mkpokọta ihe ndị a kpọchiri akpọchi n'ikuku. Dịka ọmụmaatụ, na ụlọ nhicha ISO Class 1, ọnụọgụ nke ihe ndị dị n'ime 0.1μm a na-ekwe ka ọ bụrụ mita cubic agaghị agafe 10. Ọ bụrụgodị na ikpo okwu ígwè anaghị agba nchara a na-agwọ ya nke ọma, ọ ka nwere ike imepụta ihe ndị dị n'ime ígwè ma ọ bụ ihe ndị dị n'ime oxide na-apụ apụ n'ihi ike mpụga dịka mkpọtụ ngwaọrụ na ọrụ ndị ọrụ, nke nwere ike igbochi ụzọ anya nchọpụta ma ọ bụ kpaa elu nke wafer ahụ. Ikpo okwu granite, nke nwere nnukwu ihe owuwu mineral ha (njupụta ≥2.7g/cm³) na ike dị elu (6-7 na nha Mohs), anaghị adị mfe iyi ma ọ bụ gbajie n'oge ojiji ogologo oge. Nha ndị a tụrụ na-egosi na ha nwere ike ibelata mkpokọta ihe ndị a kpọchiri akpọchi n'ikuku nke mpaghara akụrụngwa nchọpụta site na ihe karịrị 40% ma e jiri ya tụnyere ikpo okwu ígwè anaghị agba nchara, na-edobe ụkpụrụ ọkwa ụlọ nhicha nke ọma.
Tinyere njirimara ya dị ọcha, arụmọrụ zuru oke nke ikpo okwu granite karịrị nke ígwè anaghị agba nchara. N'ihe gbasara nkwụsi ike okpomọkụ, ọnụọgụ ya nke mgbasawanye okpomọkụ bụ naanị (4-8) ×10⁻⁶/℃, ihe na-erughị ọkara nke ígwè anaghị agba nchara (ihe dị ka 17×10⁻⁶/℃), nke nwere ike idobe izi ezi nke ngwaọrụ nchọpụta mgbe okpomọkụ dị n'ime ụlọ dị ọcha na-agbanwe. Njirimara dị elu nke mkpochapu (ratio mkpochapu > 0.05) nwere ike ibelata mkpọtụ nke akụrụngwa ahụ ngwa ngwa ma gbochie nyocha nchọpụta ahụ ịma jijiji. Nguzogide corrosion eke ya na-eme ka ọ kwụsie ike ọbụlagodi mgbe a na-ekpughe ya na ihe mgbaze photoresist, gas etching na kemịkalụ ndị ọzọ na-enweghị mkpa maka nchebe mkpuchi ọzọ.
Ugbu a, a na-eji ikpo okwu granite eme ihe nke ukwuu n'ụlọ ọrụ mmepụta wafer dị elu. Data na-egosi na mgbe ejiri ikpo okwu granite mee ihe, ọ̀tụ̀tụ̀ nghọtahie nke nchọpụta ihe dị n'elu wafer ebelatala site na 60%, agbatịala usoro nhazi akụrụngwa ugboro atọ, ọnụ ahịa mmepụta niile adalatala site na 25%. Ka ụlọ ọrụ semiconductor na-aga n'ihu na nkenke dị elu, ikpo okwu granite, yana uru ha dị ka mwepụta ion metal efu na mmetọ obere ihe, ga-anọgide na-enye nkwado kwụsiri ike na nke a pụrụ ịtụkwasị obi maka nyocha wafer, na-aghọ ike dị mkpa na-akwalite ọganihu nke ụlọ ọrụ ahụ.
Oge ozi: Mee-20-2025