N'ichepụta semiconductor, igwe fotolithography bụ ngwaọrụ dị mkpa nke na-ekpebi izi ezi nke ibe, na ntọala granite, nke nwere ọtụtụ njirimara ya, aghọwo ihe dị mkpa nke igwe fotolithography.
Nkwụsi ike nke okpomọkụ: "Ọta" megide mgbanwe okpomọkụ
Mgbe igwe fotolithography na-arụ ọrụ, ọ na-emepụta oke ọkụ. Ọbụna mgbanwe okpomọkụ nke naanị 0.1 ℃ nwere ike ime ka nrụrụ nke akụrụngwa akụrụngwa ma metụta izi ezi fotolithography. Ọnụ ọgụgụ nke mgbasawanye ọkụ nke granite dị oke ala, naanị 4-8 × 10⁻⁶ / ℃, nke bụ ihe dịka 1/3 nke ígwè na 1/5 nke nke aluminom alloy. Nke a na-enyere ntọala granite aka ịnọgide na-enwe nkwụsi ike nke akụkụ mgbe igwe fotolithography na-arụ ọrụ ogologo oge ma ọ bụ mgbe okpomọkụ gburugburu ebe obibi na-agbanwe, na-eme ka nhazi nke ọma nke ngwa anya na nhazi ígwè ọrụ.
Ọrụ mgbochi ịma jijiji nke ukwuu: "sponge" nke na-amịkọrọ ịma jijiji
N'ime ụlọ ọrụ semiconductor, ọrụ nke akụrụngwa gbara ya gburugburu na mmegharị nke ndị mmadụ nwere ike ime ka mkpọtụ. Granite nwere njupụta dị elu na udidi siri ike, ọ nwekwara ihe ndị na-eme ka mmiri dị mma nke ukwuu, na-enwe oke nkwụsịtụ ugboro 2 ruo 5 karịa nke ọla. Mgbe a na-ebufe mkpọtụ mpụga na ntọala granite, esemokwu dị n'etiti kristal mineral dị n'ime na-agbanwe ike ịma jijiji ka ọ bụrụ ike ọkụ maka mgbasa, nke nwere ike belata mkpọtụ ahụ n'ime obere oge, na-ekwe ka igwe fotolithography weghachi ngwa ngwa nkwụsi ike ma zere nhụsianya ma ọ bụ ngbanwe nke ụkpụrụ fotolithography n'ihi ịma jijiji.
Nkwụsi ike nke kemịkalụ: "Onye nlekọta" nke gburugburu dị ọcha
Ime nke igwe fotolithography na-abanye na kọntaktị kemịkalụ dị iche iche, na ihe igwe nkịtị na-adịkarị mfe corrosion ma ọ bụ ntọhapụ nke ahụ. Granite mejupụtara mineral dị ka quartz na feldspar. Ọ nwere akụrụngwa kemịkalụ kwụsiri ike yana nguzogide corrosion siri ike. Mgbe etinyere ya na ngwọta acid na alkali, nrụrụ elu dị ntakịrị. Ka ọ dị ugbu a, nnukwu ihe owuwu ya na-emepụta ihe fọrọ nke nta ka ọ bụrụ ihe mkpofu ma ọ bụ uzuzu, na-emezu ihe achọrọ nke ụkpụrụ ụlọ dị ọcha kachasị elu ma na-ebelata ihe ize ndụ nke mmetọ wafer.
Nhazi nhazi: "ihe dị mma" maka ịmepụta akara nrịbama
Ọ dị mkpa ka etinye ihe ndị bụ isi nke igwe fotolithography n'elu ebe ntụaka dị elu. Ọdịdị dị n'ime nke granite bụ otu ma ọ dị mfe ịhazi ya na nkenke dị oke elu site na egweri, polishing na usoro ndị ọzọ. Ya flatness nwere ike iru ≤0.5μm/m, na elu roughness Ra bụ ≤0.05μm, na-enye a kpọmkwem nwụnye ndabere maka components dị ka anya anya m.
Ogologo ndụ ogologo yana enweghị mmezi: "ngwaọrụ dị nkọ" maka mbelata ọnụ ahịa
E jiri ya tụnyere ihe ígwè ndị na-adị mfe ike ọgwụgwụ na mgbawa maka iji ogologo oge eme ihe, granite na-enweghi ike ịnweta nrụrụ plastik ma ọ bụ mgbaji n'okpuru ibu nkịtị, ọ dịghịkwa achọ ọgwụgwọ elu, si otú a na-ezere ihe ize ndụ nke mkpuchi peeling na mmetọ. N'ime ngwa ndị bara uru, mgbe ejiri ya mee ihe ruo ọtụtụ afọ, isi ihe ngosi arụmọrụ nke isi granite ka nwere ike ịnọgide na-eguzosi ike, na-ebelata ọrụ na ụgwọ ọrụ nke akụrụngwa.
Site na nkwụsi ike nke okpomọkụ, iguzogide vibration na inertness kemịkalụ, ọtụtụ njirimara nke isi granite na-emezu ihe achọrọ nke igwe fotolithography. Ka usoro n'ichepụta mgbawa na-aga n'ihu na-etolite n'ụzọ ziri ezi, ntọala granite ga-aga n'ihu na-arụ ọrụ na-enweghị atụ n'ọhịa nke imepụta semiconductor.
Oge nzipu: Mee-20-2025