Mgbanwe Nkwenye na Mmepụta Semiconductor: Mgbe granite zutere teknụzụ micron
1.1 Nchọpụta ndị a na-atụghị anya ya na sayensị ihe
Dịka akụkọ nke SEMI International Semiconductor Association nke afọ 2023 si kwuo, pasentị iri isii na atọ nke ihe ndị e ji emepụta ihe n'ụwa amalitela iji ntọala granite kama iji ikpo okwu ígwè ọdịnala. Nkume okike a, nke sitere na magma condensation n'ime ụwa, na-edegharị akụkọ ihe mere eme nke mmepụta semiconductor n'ihi ihe pụrụ iche ya:
Uru nke inertia okpomọkụ: ọnụọgụ mgbasa okpomọkụ nke granite 4.5×10⁻⁶/℃ bụ naanị 1/5 nke ígwè anaghị agba nchara, a na-ejikwa nkwụsi ike nha nke ±0.001mm na-arụ ọrụ na-aga n'ihu nke igwe lithography.
Njirimara nke imechi mkpọtụ: ọnụọgụ esemokwu dị n'ime dị okpukpu iri na ise karịa nke ígwè a kpụrụ akpụ, na-amịkọrọ akụrụngwa nke ọma micro-vibration
Ọdịdị magnetization efu: wepụ njehie magnet kpamkpam na nha laser
1.2 Njem mgbanwe site na nke m gaa na nke mara mma
Dịka ọmụmaatụ, site na iji ihe owuwu ZHHIMG dị na Shandong, a ga-eme otu granite raw:
Igwe eji arụ ọrụ nke ọma: ebe a na-arụ ọrụ njikọ eriri ise maka awa 200 nke igwe na-aga n'ihu, oke ike elu ruo Ra0.008μm
Ọgwụgwọ ịka nká nke e ji aka mee: awa iri anọ na asatọ nke ntọhapụ nrụgide eke n'ime ụlọ ọrụ okpomọkụ na iru mmiri mgbe niile, nke na-eme ka nkwụsi ike nke ngwaahịa ahụ dịkwuo mma site na 40%
Nke abụọ, chọpụta nsogbu isii dị mkpa nke mmepụta semiconductor "ngwọta okwute"
2.1 Usoro mbelata ọnụego nkewa Wafer
Ihe ngosi ikpe: Mgbe ụlọ ọrụ mmepụta chip na Germany nakweere ikpo okwu granite gas anyị:
| Dayameta Wafer | Mbelata ọnụego mgbawa | mmezi larịị |
| sentimita iri na abụọ | Pasentị iri isii na asaa | ≤0.001mm |
| sentimita iri na asatọ | 82% | ≤0.0005mm |
2.2 Atụmatụ mmepe ziri ezi nke nhazi Lithographic
Sistemụ nkwụghachi ụgwọ okpomọkụ: ihe mmetụta seramiiki agbakwunyere na-enyocha mgbanwe ọdịdị n'oge dị adị ma na-agbanwe ntụgharị ikpo okwu na akpaghị aka
Data a tụrụ: n'okpuru mgbanwe nke 28℃ ± 5℃, izi ezi nke itinye ihe na-agbanwe ihe na-erughị 0.12μm
Oge ozi: Maachị-24-2025