Mgbanwe nke ọma na nrụpụta semiconductor: Mgbe granite zutere teknụzụ micron
1.1 Nchọpụta ndị a na-atụghị anya ya na sayensị akụrụngwa
Dị ka akụkọ 2023 SEMI International Semiconductor Association si kwuo, 63% nke fabs dị elu n'ụwa amalitela iji ntọala granite kama ikpo okwu ọla ọdịnala. Nkume okike a, nke sitere na magma condensation nke dị n'ime ụwa, na-edegharị akụkọ ihe mere eme nke nrụpụta semiconductor n'ihi njirimara anụ ahụ pụrụ iche:
Thermal inertia uru: thermal mgbasa ọnụọgụ nke konkiri 4.5 × 10⁻⁶ / ℃ bụ naanị 1/5 nke igwe anaghị agba nchara, na akụkụ kwụsie ike nke ± 0.001mm na-nọgidere na-aga n'ihu na-arụ ọrụ nke lithography igwe.
Njiri mara ịma jijiji: ọnụọgụ esemokwu dị n'ime dị okpukpu 15 karịa nke ígwè nkedo, na-anakọta ngwa ngwa nke ọma nke ọma.
Ọdịdị magnetization efu: kpochapụ njehie magnetik na nha laser
1.2 Njem metamorphosis site na nke m gaa fab
N'iji usoro mmepụta ọgụgụ isi nke ZHHIMG na Shandong dị ka ọmụmaatụ, otu mpempe granite kwesịrị ka ọ bụrụ:
Ultra-nkenke n'ichepụta: ise-axis linkage machining center maka awa 200 nke na-aga n'ihu na-egwe ọka, elu roughness ruo Ra0.008μm
Ọgwụgwọ ịka nká artificial: awa 48 nke ntọhapụ nrụgide sitere n'okike na ụlọ ọrụ okpomọkụ na iru mmiri mgbe niile, nke na-eme ka nkwụsi ike nke ngwaahịa ahụ dịkwuo 40%
Nke abụọ, mgbawa nsogbu ziri ezi isii nke nrụpụta semiconductor "ngwọta nkume"
2.1 Atụmatụ mbelata nkewa wafer
Ngosipụta ikpe: Mgbe mgbawa mgbawa na Germany nakweere ikpo okwu granite na-ese n'elu gas:
| Dayameta wafer | mgbawa ọnụego mbelata | mmụba mma |
| 12 sentimita asatọ | 67% | ≤0.001mm |
| 18 sentimita asatọ | 82% | ≤0.0005mm |
2.2 Atụmatụ ntozu ziri ezi nke lithographic
Sistemụ nkwụghachi ụgwọ okpomọkụ: ihe mmetụta seramiiki agbakwunyere na-enyocha ụdị mgbanwe ahụ ozugbo ma na-edozi ọchịchọ ikpo okwu na-akpaghị aka.
Atụtara data: n'okpuru mgbanwe nke 28 ℃ ± 5 ℃, ntinye ziri ezi na-agbanwe ihe na-erughị 0.12μm
Oge nzipu: Mar-24-2025