N'ime usoro nhazi semiconductor ziri ezi na mgbagwoju anya nke nkwakọ ngwaahịa wafer, nrụgide okpomọkụ dị ka "onye na-ebibi ihe" nke zoro ezo n'ọchịchịrị, na-eyikarị àgwà nkwakọ ngwaahịa na arụmọrụ nke ibe. Site na ọdịiche dị na ọnụọgụ mgbasawanye thermal n'etiti ibe na ihe nkwakọba ihe na mgbanwe okpomọkụ dị egwu n'oge usoro nkwakọ ngwaahịa, ụzọ ọgbọ nke nrụgide okpomọkụ dị iche iche, ma ihe niile na-arụtụ aka na nsonaazụ nke ibelata ọnụego mkpụrụ na-emetụta ogologo oge ntụkwasị obi nke ibe. Ntọala granite, nke nwere ihe onwunwe pụrụ iche, na-eji nwayọọ na-aghọ "onye inyeaka" dị ike n'ịnagide nsogbu nke nrụgide okpomọkụ.
Nsogbu nrụgide thermal na nkwakọ ngwaahịa wafer
Nkwakọ ngwaahịa wafer gụnyere ọrụ ọnụ nke ọtụtụ ihe. Ihe mejupụtara ya bụ ihe semiconductor dị ka silicon, ebe ihe nkwakọ ngwaahịa dị ka ihe nkwakọba rọba na ihe dị iche iche na-adịgasị iche n'ịdị mma. Mgbe okpomọkụ na-agbanwe n'oge usoro nkwakọ ngwaahịa, ihe dị iche iche dị iche iche na-adịgasị iche na ogo nke mgbasawanye ọkụ na nkwekọrịta n'ihi nnukwu ọdịiche dị na ọnụọgụ nke mgbasawanye ọkụ (CTE). Ka ihe atụ, ọnụọgụ nke thermal mgbasawanye nke silicon ibe bụ ihe dị ka 2.6 × 10⁻⁶ / ℃, mgbe ọnụọgụ nke thermal mgbasawanye nke nkịtị epoxy resin ịkpụzi ihe dị elu dị ka 15-20 × 10⁻⁻ / ℃. Nnukwu oghere a na-eme ka ogo mgbawa nke mgbawa na ihe nkwakọba bụrụ ihe asynchronous n'oge a na-eme ka ọ dị jụụ mgbe nkwakọchara, na-ebute nrụgide okpomọkụ siri ike na interface n'etiti abụọ ahụ. N'okpuru mmetụta na-aga n'ihu nke nrụgide okpomọkụ, wafer ahụ nwere ike ịgbawa ma gbanwee. N'ọnọdụ ndị siri ike, ọ nwedịrị ike ịkpata ntụpọ na-egbu egbu dị ka mgbawa mgbawa, mgbaji nkwonkwo solder, na delamination interface, na-ebute mmebi n'arụ ọrụ eletrik nke mgbawa na mbelata dị ukwuu na ndụ ọrụ ya. Dị ka ọnụ ọgụgụ ụlọ ọrụ si kwuo, ntụpọ ntụpọ nke nkwakọ ngwaahịa wafer kpatara nsogbu nrụgide okpomọkụ nwere ike ịdị elu dị ka 10% ruo 15%, na-aghọ isi ihe na-egbochi mmepe nke ọma na nke dị elu nke ụlọ ọrụ semiconductor.
Uru njirimara nke ntọala granite
Ọnụ ọgụgụ dị ala nke mgbasawanye thermal: Granite bụ nke nwere kristal ịnweta dị ka quartz na feldspar, yana ọnụ ọgụgụ ya nke mgbasawanye thermal dị oke ala, n'ozuzu sitere na 0.6 ruo 5 × 10⁻⁶ / ℃, nke dị nso na ibe silicon. Njirimara a na-enyere aka na n'oge a na-arụ ọrụ nkwakọ ngwaahịa wafer, ọbụlagodi mgbe enwere mgbanwe mgbanwe okpomọkụ, ọdịiche dị na mgbasawanye ọkụ n'etiti isi granite na mgbawa na ihe nkwakọba na-ebelata nke ukwuu. Dịka ọmụmaatụ, mgbe ọnọdụ okpomọkụ na-agbanwe site na 10 ℃, mgbanwe nha nke ngwugwu nkwakọ ngwaahịa wuru na ntọala granite nwere ike belata ihe karịrị 80% ma e jiri ya tụnyere ntọala ọla ọdịnala, nke na-ebelata oke nrụgide thermal nke mgbasawanye na nkwekọrịta asynchronous na-ekpo ọkụ na-akpata, ma na-enye ebe nkwado siri ike maka wafer.
Nkwụsi ike nke okpomọkụ dị mma: Granite nwere nkwụsi ike dị egwu. Ọdịdị dị n'ime ya dị oke, na kristal na-ejikọta chiri anya site na njikọ ionic na covalent, na-enye ohere iji nwayọọ nwayọọ na-eduzi okpomọkụ n'ime. Mgbe akụrụngwa nkwakọ ngwaahịa na-agafe okirikiri okpomọkụ dị mgbagwoju anya, ntọala granite nwere ike igbochi mmetụta nke mgbanwe okpomọkụ n'onwe ya ma nọgide na-enwe ọnọdụ okpomọkụ kwụsiri ike. Nnwale ndị dị mkpa na-egosi na n'okpuru mgbanwe mgbanwe okpomọkụ nke ngwa ngwa ngwa (dị ka ± 5 ℃ kwa nkeji), enwere ike ịchịkwa okpomọkụ ịdị n'otu nke isi ihe granite n'ime ± 0.1 ℃, na-ezere ihe ngosi nke nrụgide nrụgide okpomọkụ kpatara site na ọdịiche okpomọkụ mpaghara, n'ịhụ na wafer dị n'otu n'otu ma na-ebelata okpomọkụ nke gburugburu ebe obibi na nrụgide n'oge dum.
Nnukwu siri ike na ịma jijiji: N'oge a na-arụ ọrụ nkwakọ ngwaahịa wafer, akụkụ ndị na-ebugharị n'ibu n'ime (dịka moto, ngwaọrụ nnyefe, wdg) ga-eme ka mkpọtụ. Ọ bụrụ na a na-ebunye vibrations ndị a na wafer, ha ga-eme ka mmebi nke nrụgide okpomọkụ na-akpata na wafer. Ntọala Granite nwere nnukwu nkwụsi ike na ike dị elu karịa nke ọtụtụ ihe ọla, nke nwere ike iguzogide nnyonye anya nke mpụta nke mpụga. Ka ọ dị ugbu a, ihe owuwu ime ya pụrụ iche na-enye ya ọmarịcha arụmọrụ damping ma na-enyere ya aka ịgbasa ike ịma jijiji ngwa ngwa. Ihe omuma nyocha na-egosi na isi ihe granite nwere ike ibelata vibration dị elu (100-1000Hz) nke a na-eme site na ọrụ nke ngwa nkwakọ ngwaahịa site na 60% ruo 80%, na-ebelata mmetụta njikọ nke vibration na nrụgide okpomọkụ, na n'ihu n'ihu n'ihu n'ịhụta nkenke na ntụkwasị obi dị elu nke nkwakọ ngwaahịa wafer.
Mmetụta ngwa bara uru
N'ime ahịrị nrụpụta nkwakọ ngwaahịa wafer nke ụlọ ọrụ nrụpụta semiconductor ama ama, mgbe ewebatachara akụrụngwa nkwakọ ngwaahịa nwere ntọala granite, emebela ọmarịcha ihe. Dabere na nyocha nke data nyocha nke 10,000 wafers mgbe nkwakọchara, tupu ịnakwere ntọala granite, ntụpọ ntụpọ nke wafer warping nke nrụgide okpomọkụ kpatara bụ 12%. Otú ọ dị, mgbe ịgbanwere na granite base, ntụpọ ntụpọ gbadara nke ọma ruo n'ime 3%, ọnụego mkpụrụ na-abawanye nke ọma. Ọzọkwa, ogologo oge ntụkwasị obi ule gosiri na mgbe 1,000 cycles nke elu okpomọkụ (125 ℃) na ala okpomọkụ (-55 ℃), ọnụ ọgụgụ nke solder nkwonkwo ọdịda nke mgbawa dabeere na konkiri isi ngwugwu e belatara 70% ma e jiri ya tụnyere omenala isi ngwugwu, na arụmọrụ kwụsie ike nke mgbawa e ukwuu mma.
Dika teknụzụ semiconductor na-aga n'ihu na-aga n'ihu na nkenke dị elu yana nha pere mpe, ihe achọrọ maka njikwa nrụgide okpomọkụ na nkwakọ ngwaahịa wafer na-esiwanye ike. Ntọala Granite, yana uru ha zuru oke na ọnụọgụ mgbasawanye ọkụ dị ala, nkwụsi ike nke okpomọkụ na mbelata mkpọtụ, abụrụla nhọrọ bụ isi maka ịkwalite ogo nkwakọ ngwaahịa wafer na ibelata mmetụta nke nrụgide okpomọkụ. Ha na-arụ ọrụ dị mkpa na-arịwanye elu n'ịhụ na mmepe na-adịgide adịgide nke ụlọ ọrụ semiconductor.
Oge nzipu: Mee-15-2025